Nature of chemical states of sulfur embedded in...

physica status solidi (RRL) - Rapid Research Letters 2015 / 09 Vol. 9; Iss. 9

Nature of chemical states of sulfur embedded in atomic-layer-deposited HfO 2 film on Ge substrate for interface passivation

Cho, Deok-Yong, Seok, Tae Jun, Jin, Hyun Soo, Song, Hochul, Han, Seungwu, Park, Tae Joo
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Volume:
9
Language:
english
Journal:
physica status solidi (RRL) - Rapid Research Letters
DOI:
10.1002/pssr.201510237
Date:
September, 2015
File:
PDF, 495 KB
english, 2015
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