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Low-thermal budget flash light annealing for Al 2 O 3 surface passivation
Simon, Daniel K., Henke, Thomas, Jordan, Paul M., Fengler, Franz P. G., Mikolajick, Thomas, Bartha, Johann W., Dirnstorfer, IngoVolume:
9
Language:
english
Journal:
physica status solidi (RRL) - Rapid Research Letters
DOI:
10.1002/pssr.201510306
Date:
November, 2015
File:
PDF, 416 KB
english, 2015