Influence of substrate temperature and N 2...

Surface and Interface Analysis 2015 / 11 Vol. 47; Iss. 11

Influence of substrate temperature and N 2 /Ar flow ratio on the stoichiometry, structure and hardness of TaNx coatings deposited by DC reactive sputtering

Valdez, K., Espinosa-Arbeláez, D. G., García-Herrera, J. E., Muñoz-Saldaña, J., Farias, M. H., De la Cruz, W.
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Volume:
47
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5808
Date:
November, 2015
File:
PDF, 455 KB
english, 2015
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