Tailoring of microstructure in hydrogenated nanocrystalline Si thin films by ICP-assisted RF magnetron sputtering
Shin, Kyung Sik, Sahu, Bibhuti Bhusan, Kumar, Manish, Leksakul, Komgrit, Han, Jeon GeonVolume:
48
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/48/47/475303
Date:
December, 2015
File:
PDF, 1.24 MB
english, 2015