Full-field interferometry using infinity corrected optics

Full-field interferometry using infinity corrected optics

Charrett, T O H, Tatam, R P
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Volume:
27
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/27/1/015402
Date:
January, 2016
File:
PDF, 963 KB
english, 2016
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