Reduction of thermal emission background in high...

Journal of Micromechanics and Microengineering 2016 / 05 Vol. 26; Iss. 5

Reduction of thermal emission background in high temperature microheaters

Armstrong, Philip R, Mah, Merlin L, Olson, Kyle D, Taylor, Lucas N, Talghader, Joseph J
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Volume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/5/055004
Date:
May, 2016
File:
PDF, 1.05 MB
english, 2016
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