High precision silicon piezo resistive SMART pressure...

Journal of Physics Conference Series 2005 / 01 Vol. 15

High precision silicon piezo resistive SMART pressure sensor

Brown, Rod
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Volume:
15
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/15/1/004
Date:
January, 2005
File:
PDF, 539 KB
english, 2005
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