TiO 2 thin and thick films...

Journal of Physics Conference Series 2015 / 03 Vol. 591

TiO 2 thin and thick films grown on Si/glass by sputtering of titanium targets in an RF inductively coupled plasma

Valencia-Alvarado, R, de la Piedad-Beneitez, A, López-Callejas, R, Mercado-Cabrera, A, Peña-Eguiluz, R, Muñoz-Castro, A E, Rodríguez-Méndez, B G, de la Rosa-Vázquez, J M
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Volume:
591
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/591/1/012042
Date:
March, 2015
File:
PDF, 1.13 MB
english, 2015
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