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[IEEE 2014 Joint IEEE International Symposium on the Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy (ISAF/IWATMD/PFM) - State College, PA, USA (2014.5.12-2014.5.16)] 2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy - Modeling and simulation of silicon wafer backside grinding process
Li, Zhaoqiang, Jing, Xiangmeng, Jiang, Feng, Zhang, WenqiYear:
2014
Language:
english
DOI:
10.1109/isaf.2014.6917996
File:
PDF, 662 KB
english, 2014