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SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - Electromigration and current-carrying implications for aluminum-based metallurgy with tungsten stud via interconnections
Rathore, Hazara S., Filippi, R. G., Wachnik, R. A., Estabil, Jose J., Kwok, Thomas, Kwok, Thomas, Kikkawa, Takamaro, Shenai, KrishnaVolume:
1805
Year:
1993
Language:
english
DOI:
10.1117/12.145481
File:
PDF, 799 KB
english, 1993