SPIE Proceedings [SPIE Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics - Zurich, Switzerland (Monday 4 October 1993)] Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics - Double heterodyne interferometry for high-precision distance measurements
Dalhoff, E., Fischer, Edgar W., Heim, S., Tiziani, Hans J., Gruen, Armin, Kahmen, HeribertVolume:
2252
Year:
1994
Language:
english
DOI:
10.1117/12.169861
File:
PDF, 217 KB
english, 1994