SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Design for Manufacturability through Design-Process Integration VII - Enhanced spacer-is-dielectric (sid) decomposition flow with model-based verification
Du, Yuelin, Song, Hua, Shiely, James, Wong, Martin D. F., Mason, Mark E., Sturtevant, John L.Volume:
8684
Year:
2013
Language:
english
DOI:
10.1117/12.2011029
File:
PDF, 1.89 MB
english, 2013