SPIE Proceedings [SPIE SPIE's 1995 Symposium on...

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SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Integrated Circuit Metrology, Inspection, and Process Control IX - Broadband UV small-spot spectroscopic ellipsometer

Piwonka-Corle, Timothy R., Kaack, Torsten R., Scoffone, K. F., Chen, Xing, Malwankar, K. B., Keefer, Mark E., LaComb, Jr., Lloyd J., Stehle, Jean-Louis P., Piel, Jean-Philippe, Zahorski, Dorian, Thoma
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Volume:
2439
Year:
1995
Language:
english
DOI:
10.1117/12.209239
File:
PDF, 851 KB
english, 1995
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