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SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Applications of Laser Plasma Radiation II - High-power excimer laser-generated plasma source for x-ray microlithography
Shields, Harry, Powers, Michael F., Turcu, I. C. Edmond, Ross, Ian N., Maldonado, Juan R., Burkhalter, Philip G., Newman, D. A., Richardson, Martin C., Kyrala, George A.Volume:
2523
Year:
1995
Language:
english
DOI:
10.1117/12.220972
File:
PDF, 481 KB
english, 1995