SPIE Proceedings [SPIE San Dieg - DL Tentative - San Diego, CA (Sunday 1 July 1990)] X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography - Performance of multilayer-coated figured optics for soft x-rays near the diffraction limit
Raab, Eric L., Tennant, Donald M., Waskiewicz, Warren K., MacDowell, Alastair A., Freeman, Richard R., Hoover, Richard B., Walker II, Arthur B. C.Volume:
1343
Year:
1991
Language:
english
DOI:
10.1117/12.23183
File:
PDF, 381 KB
english, 1991