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SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - LIGA tunable spectral filter performance
Cox, J. Allen, Dobson, David C., Ohnstein, Thomas R., Zook, J. David, Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.Volume:
3008
Year:
1997
Language:
english
DOI:
10.1117/12.271426
File:
PDF, 521 KB
english, 1997