SPIE Proceedings [SPIE ISMA '97 International Symposium on...

  • Main
  • SPIE Proceedings [SPIE ISMA '97...

SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microlithographic Techniques in IC Fabrication - Enhanced poly gate critical dimension control by using a SiOxNy ARC film

Bencher, Christopher, Chu, Tony, Tan, Way Tat, Zou, Gang, Lin, Qunying, Yi, Xu, Dong, Wang Xu, Wen, Ma Wei, Yoon, Soon Fatt, Yu, Raymond, Mack, Chris A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3183
Year:
1997
Language:
english
DOI:
10.1117/12.280548
File:
PDF, 1.21 MB
english, 1997
Conversion to is in progress
Conversion to is failed