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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - Contactless actuation of giant magnetostriction thin-film alloy bimorphs for two-dimensional scanning application
Orsier, Elisabeth, Garnier, Amalia, Hiramoto, Toshiro, Fujita, Hiroyuki, Betz, Jochen, MacKay, Ken, Peuzin, Jean-Claude, Givord, Dominique, Chau, Kevin H., French, Patrick J.Volume:
3224
Year:
1997
Language:
english
DOI:
10.1117/12.284505
File:
PDF, 1.59 MB
english, 1997