SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III - Electrical characterization of FSG low K dielectric deposition in HDP and PECVD tools
Bersuker, Gennadi, Shapiro, Michael J., Werking, James, Kim, Sang U., Ghanbari, Abe, Toprac, Anthony J.Volume:
3213
Year:
1997
Language:
english
DOI:
10.1117/12.284639
File:
PDF, 170 KB
english, 1997