![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE 17th Annual BACUS Photomask Technology and Management - Redwood City, CA (Wednesday 17 September 1997)] 17th Annual BACUS Symposium on Photomask Technology and Management - Automatic gate CD control for a full-chip-scale SRAM device
Park, Chul-Hong, Kim, Tae K., Lee, Hoong-Joo, Kong, Jeong-Taek, Lee, Sang-Hoon, Reynolds, James A., Grenon, Brian J.Volume:
3236
Year:
1998
Language:
english
DOI:
10.1117/12.301206
File:
PDF, 318 KB
english, 1998