![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications - Ancona, Italy (Tuesday 16 June 1998)] Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications - Transient measurement of surface deflection for beams and membranes in micromechanical devices
Klein, Andreas, Schroth, Andreas, Gerlach, Gerald, Maeda, Ryutaro, Tomasini, Enrico P.Volume:
3411
Year:
1998
Language:
english
DOI:
10.1117/12.307748
File:
PDF, 2.68 MB
english, 1998