SPIE Proceedings [SPIE Optical Engineering for Sensing and Nanotechnology (ICOSN '99) - Yokohama, Japan (Wednesday 16 June 1999)] Optical Engineering for Sensing and Nanotechnology (ICOSN '99) - New error-compensation method in a linear encoder using phase-shifted grating
Song, Ju Ho, Kim, Kyung-Chan, Kim, Soo Hyun, Kwak, Yoon Keun, Yamaguchi, IchirouVolume:
3740
Year:
1999
Language:
english
DOI:
10.1117/12.347780
File:
PDF, 207 KB
english, 1999