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SPIE Proceedings [SPIE International Conference on Optical Metrology - Pultusk Castle, Poland (Wednesday 20 October 1999)] Interferometry '99: Techniques and Technologies - Analysis of tolerances in a grating interferometer for high-resolution displacement measurement
Dobosz, Marek, Kujawinska, Malgorzata, Takeda, MitsuoVolume:
3744
Year:
1999
Language:
english
DOI:
10.1117/12.357720
File:
PDF, 651 KB
english, 1999