SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Device and Process Technologies for MEMS and Microelectronics - Physical and electrical properties of thin dielectrics prepared by photoassisted growth in an NO environment
Jamet, Phillipe, Harrison, H. Barry, Dimitrijev, Sima, Tanner, Philip G., Chau, Kevin H., Dimitrijev, SimaVolume:
3892
Year:
1999
Language:
english
DOI:
10.1117/12.364497
File:
PDF, 296 KB
english, 1999