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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - Hybrid MOEMS approaches for fiber optic switches and switch matrices
Goering, Rolf, Wippermann, Frank, Kubitz, Kay, Motamedi, M. Edward, Goering, RolfVolume:
4178
Year:
2000
Language:
english
DOI:
10.1117/12.396510
File:
PDF, 1.15 MB
english, 2000