SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - Present and future interference microscope systems for magnetic head metrology
Caber, Paul J., Olszak, Artur G., Ragan, Chip, Aziz, David J., Al-Jumaily, Ghanim A., Duparre, Angela, Singh, BhanwarVolume:
4099
Year:
2000
Language:
english
DOI:
10.1117/12.405817
File:
PDF, 2.33 MB
english, 2000