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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Design, Characterization, and Packaging for MEMS and Microelectronics II - Mobility spectrum techniques for characterizing multilayer semiconductor structures
Musca, Charles A., Nguyen, Thuyen, Antoszewski, Jarek, Redfern, David A., Dell, John M., Faraone, Lorenzo, Franzon, Paul D., Malshe, Ajay P., Tay, Francis E.Volume:
4593
Year:
2001
Language:
english
DOI:
10.1117/12.448863
File:
PDF, 332 KB
english, 2001