SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Electronics and Structures for MEMS II - Experimental investigation of sensitivity dependence with respect to waveguide position on a micromachined diaphragm in a silicon-based integrated optic pressure sensor
Goto, Takeshi, Yamada, Atsushi, Ohkawa, Masashi, Sekine, Seishi, Sato, Takashi, Bergmann, Neil W., Abbott, Derek, Hariz, Alex, Varadan, Vijay K.Volume:
4591
Year:
2001
Language:
english
DOI:
10.1117/12.449164
File:
PDF, 356 KB
english, 2001