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SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Characteristics of a torsional resonator with two degrees of freedom fabricated by UV-LIGA
Usuda, Takashi, Basrour, Skandar, Majjad, H., Coudevylle, Jean-Rene, de Labachelerie, Michel, Courtois, Bernard, Karam, Jean Michel, Markus, Karen W., Michel, Bernd, Mukherjee, Tamal, Walker, James A.Volume:
4755
Year:
2002
Language:
english
DOI:
10.1117/12.462860
File:
PDF, 474 KB
english, 2002