SPIE Proceedings [SPIE Optomechatronic Systems III - Stuttgart, Germany (Tuesday 12 November 2002)] Optomechatronic Systems III - In situ optical probe interferometer for measuring displacement of nanoindenter: a configuration
Li, Zhi, Herrmann, Konrad, Pohlenz, Frank, Yoshizawa, ToruVolume:
4902
Year:
2002
DOI:
10.1117/12.467681
File:
PDF, 797 KB
2002