![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE's 9th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 17 March 2002)] Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology - Design concept and preliminary experimental demonstration of MEMS gyroscopes with 4-DOF master-slave architecture
Acar, Cenk, Shkel, Andrei M., Varadan, Vijay K.Volume:
4700
Year:
2002
Language:
english
DOI:
10.1117/12.475019
File:
PDF, 848 KB
english, 2002