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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Formation and its characteristics of PLZT layered film structure for transducers
Ichiki, Masaaki, Chiao, Jung-Chih, Hariz, Alex J., Kobayashi, Takeshi, Morikawa, Yasushi, Jamieson, David N., Parish, Giacinta, Mabune, Yosuke, Nakada, Takeshi, Varadan, Vijay K., Nonaka, Kazuhiro, EnVolume:
5276
Year:
2003
Language:
english
DOI:
10.1117/12.522794
File:
PDF, 324 KB
english, 2003