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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Laser micromachining in microelectronic industry by water-jet-guided laser
Herman, Peter R., Sibailly, Ochelio, Wagner, Frank, Fieret, Jim, Pique, Alberto, Richerzhagen, Bernold, Okada, Tatsuo, Bachmann, Friedrich G., Hoving, Willem, Washio, Kunihiko, Xu, Xianfan, Dubowski,Volume:
5339
Year:
2004
Language:
english
DOI:
10.1117/12.529047
File:
PDF, 809 KB
english, 2004