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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - Compact triangulation distance sensor realized by wafer bending technique
Sasaki, Minoru, Urey, Hakan, El-Fatatry, Ayman, Endou, Satoshi, Hane, KazuhiroVolume:
5455
Year:
2004
Language:
english
DOI:
10.1117/12.545267
File:
PDF, 218 KB
english, 2004