SPIE Proceedings [SPIE 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Dresden, Germany (Monday 12 January 2004)] 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Proposal for a distributed parallel system for high-throughput maskless e-beam lithography
Groves, Timothy R., Pickard, Daniel S., Behringer, Uwe F. W.Volume:
5504
Year:
2004
Language:
english
DOI:
10.1117/12.568030
File:
PDF, 187 KB
english, 2004