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SPIE Proceedings [SPIE Asia-Pacific Optical Communications - Beijing, China (Sunday 7 November 2004)] Semiconductor and Organic Optoelectronic Materials and Devices - Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch
Yin, Dongqing, Zah, Chung-En, Luo, Yi, Lin, Jinhui, Chen, Qinghua, Tsuji, Shinji, Chen, Zhangyuan, Xu, Anshi, Wu, WengangVolume:
5624
Year:
2004
Language:
english
DOI:
10.1117/12.574098
File:
PDF, 168 KB
english, 2004