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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Data Analysis and Modeling for Process Control II - An electrostatic analysis of subthreshold behavior in FINFET
Murugan, Balasubramanian, Emami, Iraj, Venkat, Rama, Saha, SamarVolume:
5755
Year:
2005
Language:
english
DOI:
10.1117/12.597698
File:
PDF, 477 KB
english, 2005