![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Hybrid ORC method for Low K1 process
Nam, Byungho, Weed, J. Tracy, Martin, Patrick M., Choi, Jaeseung, Ahn, Yeongbae, Kim, Cheolkyun, Yune, Hyoungsoon, Moon, James, Yim, Donggyu, Kim, JinwoongVolume:
5992
Year:
2005
Language:
english
DOI:
10.1117/12.632023
File:
PDF, 933 KB
english, 2005