SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - High-performance adaptive optics using microscale assembly
Cohn, Michael, Olivier, Scot S., Tadigadapa, Srinivas A., Chang, Kevin, Papavasiliou, Alexandros, Henning, Albert K., Oliver, Scot, Kim, Gina, Matus, Gabriel, Xiao, Zhixiong, Cheung, Steven, Saechao,Volume:
6113
Year:
2006
Language:
english
DOI:
10.1117/12.658058
File:
PDF, 649 KB
english, 2006