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SPIE Proceedings [SPIE ICMIT 2005: Merchatronics, MEMS, and Smart Materials - Chongqing, China (Tuesday 20 September 2005)] ICMIT 2005: Mechatronics, MEMS, and Smart Materials - Multi-layered precision metal structures by LCLD fabrication
Wei, Yunlong, Ma, Deyi, Song, Danlu, Chong, Kil To, Takahashi, Takayuki, Zhou, Hongyan, Liu, Shengping, Li, Zushu, Jiang, Zhongwei, Choi, Jin YoungVolume:
6040
Year:
2005
Language:
english
DOI:
10.1117/12.664264
File:
PDF, 194 KB
english, 2005