SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - Reduced basis method for real-time inverse scatterometry
Pomplun, Jan, Bodermann, Bernd, Burger, Sven, Zschiedrich, Lin, Schmidt, FrankVolume:
8083
Year:
2011
Language:
english
DOI:
10.1117/12.889892
File:
PDF, 623 KB
english, 2011