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ECS Transactions [ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] - Electrical Properties Measurement for Interface Research in Silicon Bonding
Miao, Gu-Jin, Zhang, Zhao-Hua, Ren, Tian-Ling, Zhou, Chang-Jian, Chen, Tao, Lin, Hui-Wang, Liu, Li-TianYear:
2010
Language:
english
DOI:
10.1149/1.3334809
File:
PDF, 656 KB
english, 2010