Devices, structures, and processes for optical MEMS

IEEJ Transactions on Electrical and Electronic Engineering 2007 Vol. 2; Iss. 3

Devices, structures, and processes for optical MEMS

Hyuck Choo, Richard S. Muller
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Volume:
2
Year:
2007
Language:
english
Pages:
16
DOI:
10.1002/tee.20156
File:
PDF, 2.37 MB
english, 2007
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