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Influence of Gas Flow Ratio in PE-CVD Process on Mechanical Properties of Silicon Nitride Film
Hyun-Jin Oh, Yoshitada Isono, Takahiro Namazu, Yoshihiro Saito, Akira YamaguchiVolume:
3
Year:
2008
Language:
english
Pages:
9
DOI:
10.1002/tee.20268
File:
PDF, 614 KB
english, 2008