Electrostatically Controlled, Pneumatically Actuated Microvalve with Low Pressure Loss
Daisuke Satoh, Shuji Tanaka, Masayoshi EsashiVolume:
3
Year:
2008
Language:
english
Pages:
8
DOI:
10.1002/tee.20271
File:
PDF, 490 KB
english, 2008