Multiphysics analysis for micro electromechanical systems based on electrical circuit simulator
Makoto Mita, Satoshi Maruyama, Yuheon Yi, Kazuhiro Takahashi, Hiroyuki Fujita, Hiroshi ToshiyoshiVolume:
6
Year:
2011
Language:
english
Pages:
10
DOI:
10.1002/tee.20642
File:
PDF, 281 KB
english, 2011