Determination of the composition of Ultra-thin Ni-Si films...

Determination of the composition of Ultra-thin Ni-Si films on Si: constrained modeling of electron probe microanalysis and x-ray reflectivity data

Tran M. Phung, Jacob M. Jensen, David C. Johnson, John J. Donovan, Brian G. McBurnett
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Volume:
37
Year:
2008
Language:
english
Pages:
7
DOI:
10.1002/xrs.1102
File:
PDF, 288 KB
english, 2008
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