ChemInform Abstract: Low Pressure Chemical Vapor Deposition of Borophosphosilicate Glass Films Produced by Injection of Miscible DADBS-TMB-TMP Liquid Sources.
LEVY, R. A., GALLAGHER, P. K., SCHREY, F.Volume:
18
Journal:
ChemInform
DOI:
10.1002/chin.198744365
Date:
November, 1987
File:
PDF, 232 KB
1987