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ChemInform Abstract: Oxidation of Plasma-Deposited α-SixC1-x:H Films
ELDRIDGE, J. M., MOORE, J. O., OLIVE, G., DUNTON, V.Volume:
21
Journal:
ChemInform
DOI:
10.1002/chin.199037021
Date:
September, 1990
File:
PDF, 144 KB
1990