Design and analysis of a compliant micro-positioning platform with embedded strain gauges and viscoelastic damper
Dao, Thanh-Phong, Huang, Shyh-ChourVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3048-3
Date:
February, 2017
File:
PDF, 2.75 MB
english, 2017